Dimensional and Elemental Analysis of Particulate Contaminations on Silicon Wafers

Silicon-on-Insulator Wafers with Buried Cavities

Contactless Characterization of Silicon Wafers

Contactless measurements are attractive and more commonly used because they do not contaminate the sample and generally do not require sample preparation. After an outline of the more common contactless characterization techniques, I will discuss a few of these in more detail. In particular resistivity or doping density profiling, minority carrier lifetime, stress, temperature, layer thickness,...

Terahertz imaging of silicon wafers

Silicon samples with and without implanted layers have been imaged with a standard time-domain terahertz ~THz! imaging system. The carrier concentration and mobility of the substrate have been extracted from the frequency dependence of the THz transmittance using a simple model based on the Drude approximation. The carrier concentration of implanted layers could be determined simply from the re...

content analysis of l1 and l2 writing textbooks and the perception analysis of university professors on the influence of english writing expertise on the persian in an efl context

the importance of writing as a complex skill in applied linguistics has drawn the attention of many researchers to evaluate textbooks in order to help learners gain self-sufficiency and autonomy in the field of language use and communication. investigations have shown that developments in textbooks evaluation can promote the quality of pedagogies and consequently the learning. this study attemp...

Detection and characterization of trace element contamination on silicon wafers

Increasing the speed and complexity of semiconductor integrated circuits requires advanced processes that put extreme constraints on the level of metal contamination allowed on the surfaces of silicon wafers. Such contamination degrades the performance of the ultrathin SiO2 gate dielectrics that form the heart of the individual transistors. Ultimately, reliability and yield are reduced to level...